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Dergiler / Politeknik Dergisi / 2026 / Cilt: 28 Sayı: 1

Hibrit AlGaSb-Ar/H2 Mikro Plazma Sisteminde DC Glow Deşarjlarının Modellenmesi ve Simülasyonu

Modeling and Simulation of DC Glow Discharges in the AlGaSb coupled Ar/H2 Hybrid Micro Plasma System

Erhan Ongun(GAZI UNIVERSITY)0009-0007-4966-1044
Selçuk Utaş(GAZI UNIVERSITY)0000-0002-9709-516X
Hilal Kurt(GAZI UNIVERSITY)0000-0002-1277-5204
Aybaba Hançerlioğulları(KASTAMONU UNIVERSITY)0000-0002-9830-4226
Sayfa
243–250
Yayın Tarihi
2025-01-24
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⚡ TL;DR(1 Cümlede Hızlı Çıkarım)

Uygulamaya özel hibrit mikro plazma – yarı iletken tabanlı kızılötesi fotodetektör cihazlarının modellenmesinde argona bir miktar hidrojen ilavesinin etkili bir araç olarak kullanılabileceği gözlemlenmiştir.

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Amaç & Hipotez:Bu çalışmada, mikro boşluklu düzlemsel anot/katot elektrot plakalı atmosfer altı basınçta DC -beslemeli gaz deşarj-yarıiletken mikro plazma sistemlerin (GDSµPS) temel karakteristik özellikleri COMSOL Multifizik simülasyon platformunda incelendi.
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Temel Bulgular & Veri:Modelde alüminyum galyum antimonid (AlGaSb) katot elektrot, ITO/SiO2 anot elektrot, 100 µm gaz deşarj aralığına sahip mikro plazma hücresi modellendi.
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Sonuç & Katkı:Uygulamaya özel hibrit mikro plazma – yarı iletken tabanlı kızılötesi fotodetektör cihazlarının modellenmesinde argona bir miktar hidrojen ilavesinin etkili bir araç olarak kullanılabileceği gözlemlenmiştir.
🔬Tür:Modelleme & Sayısal Simülasyon
📍Kapsam:Genişletilmiş Akademik Örneklem
⚙️Değişkenler:Mikroplazma · AlGaSb · DC plazma simülasyon

Özet

Bu çalışmada, mikro boşluklu düzlemsel anot/katot elektrot plakalı atmosfer altı basınçta DC -beslemeli gaz deşarj-yarıiletken mikro plazma sistemlerin (GDSµPS) temel karakteristik özellikleri COMSOL Multifizik simülasyon platformunda incelendi. Modelde alüminyum galyum antimonid (AlGaSb) katot elektrot, ITO/SiO2 anot elektrot, 100 µm gaz deşarj aralığına sahip mikro plazma hücresi modellendi. Plazma reaktör ortamında 150 Torr basınç seviyesinde argon (Ar) ve molar 5% kısmi hidrojen karışımlı argon (Ar/H2) tanımlandı. Micro plazma hücresi 1,0 kV DC sabit gerilim altında beslendi. Model, elektron yoğunluğu, elektron enerji yoğunluğu, elektron akım yoğunluğu ve elektrik potansiyeli dahil olmak üzere çeşitli deşarj parametrelerinin uzaysal-zamansal dinamiklerini çözerek AlGaSb-Ar/H2 glow deşarj mikro plazma sisteminin geçiş fiziksel özelliklerini anlamak için simüle edildi. Uygulamaya özel hibrit mikro plazma – yarı iletken tabanlı kızılötesi fotodetektör cihazlarının modellenmesinde argona bir miktar hidrojen ilavesinin etkili bir araç olarak kullanılabileceği gözlemlenmiştir.

Abstract

Several studies have been reported on the theoretical and experimental investigation of gas discharge - semiconductor micro plasma systems (GDSµPS). In this study, a two-dimensional fluid model of a micro plasma in a square direct-current (DC) glow-discharge chamber is simulated using the finite-element method (FEM) solver COMSOL Multiphysics based on the mixture-averaged diffusion-drift theory of gas discharges and Maxwellian electron energy distribution function. A unique III-antimonide high-Ohmic semi-insulating aluminum gallium antimonide (AlGaSb) with finely digitated electron emission surface is modeled as planar cathode electrode coupled to ITO/SiO2 planar anode electrode across a gas discharge gap of 100 µm distance. Argon (Ar) and argon mixed with a mole fraction of 5% hydrogen (Ar/H2) gas medium are seperately introduced into the micro gap at sub-atmospheric pressure of 150 Torr, and the cell is driven at 1.0 kV DC by a stationary power source to simulate the transitions from electron field emission state toward self-sustained normal glow discharge state. The model is simulated to exhibit the transient physical characteristics of the AlGaSb-Ar/H2 glow-discharge micro plasma system by solving the spatio-temporal dynamics of various discharge parameters, including electron density, electron energy density, electron current density and electric potential. It has been observed that a fraction of hydrogen addition to argon can be used as an effective tool in modeling application-specific hybrid micro plasma – semiconductor based infrared photodetector devices.

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Bu Makaleye Atıf Yap

Ongun, E., Utaş, S., Kurt, H., Hançerlioğulları, A. (2025). Hibrit AlGaSb-Ar/H2 Mikro Plazma Sisteminde DC Glow Deşarjlarının Modellenmesi ve Simülasyonu. Politeknik Dergisi, Cilt: 28 Sayı: 1, 243–250. https://doi.org/10.2339/politeknik.1406036

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