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Journals / Politeknik Dergisi / 2026 / Cilt: 28 Sayı: 1

Modeling and Simulation of DC Glow Discharges in the AlGaSb coupled Ar/H2 Hybrid Micro Plasma System

Hibrit AlGaSb-Ar/H2 Mikro Plazma Sisteminde DC Glow Deşarjlarının Modellenmesi ve Simülasyonu

Erhan Ongun(GAZI UNIVERSITY)0009-0007-4966-1044
Selçuk Utaş(GAZI UNIVERSITY)0000-0002-9709-516X
Hilal Kurt(GAZI UNIVERSITY)0000-0002-1277-5204
Aybaba Hançerlioğulları(KASTAMONU UNIVERSITY)0000-0002-9830-4226
Pages
243–250
Publication Date
2025-01-24
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AI Summary & Key Takeaways

AI Insight
⚡ TL;DR(Too Long; Didn't Read)

It has been observed that a fraction of hydrogen addition to argon can be used as an effective tool in modeling application-specific hybrid micro plasma – semiconductor based infrared photodetector devices.

📌 3 Key Takeaways

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Objective & Hypothesis:Several studies have been reported on the theoretical and experimental investigation of gas discharge - semiconductor micro plasma systems (GDSµPS).
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Key Findings & Data:A unique III-antimonide high-Ohmic semi-insulating aluminum gallium antimonide (AlGaSb) with finely digitated electron emission surface is modeled as planar cathode electrode coupled to ITO/SiO2 planar anode electrode across a gas discharge gap of 100 µm distance.
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Conclusion & Impact:It has been observed that a fraction of hydrogen addition to argon can be used as an effective tool in modeling application-specific hybrid micro plasma – semiconductor based infrared photodetector devices.
🔬Design:Modeling & Simulation
📍Scope:Comprehensive Sample
⚙️Variables:Mikroplazma · AlGaSb · DC plazma simülasyon

Abstract

Several studies have been reported on the theoretical and experimental investigation of gas discharge - semiconductor micro plasma systems (GDSµPS). In this study, a two-dimensional fluid model of a micro plasma in a square direct-current (DC) glow-discharge chamber is simulated using the finite-element method (FEM) solver COMSOL Multiphysics based on the mixture-averaged diffusion-drift theory of gas discharges and Maxwellian electron energy distribution function. A unique III-antimonide high-Ohmic semi-insulating aluminum gallium antimonide (AlGaSb) with finely digitated electron emission surface is modeled as planar cathode electrode coupled to ITO/SiO2 planar anode electrode across a gas discharge gap of 100 µm distance. Argon (Ar) and argon mixed with a mole fraction of 5% hydrogen (Ar/H2) gas medium are seperately introduced into the micro gap at sub-atmospheric pressure of 150 Torr, and the cell is driven at 1.0 kV DC by a stationary power source to simulate the transitions from electron field emission state toward self-sustained normal glow discharge state. The model is simulated to exhibit the transient physical characteristics of the AlGaSb-Ar/H2 glow-discharge micro plasma system by solving the spatio-temporal dynamics of various discharge parameters, including electron density, electron energy density, electron current density and electric potential. It has been observed that a fraction of hydrogen addition to argon can be used as an effective tool in modeling application-specific hybrid micro plasma – semiconductor based infrared photodetector devices.

Özet

Bu çalışmada, mikro boşluklu düzlemsel anot/katot elektrot plakalı atmosfer altı basınçta DC -beslemeli gaz deşarj-yarıiletken mikro plazma sistemlerin (GDSµPS) temel karakteristik özellikleri COMSOL Multifizik simülasyon platformunda incelendi. Modelde alüminyum galyum antimonid (AlGaSb) katot elektrot, ITO/SiO2 anot elektrot, 100 µm gaz deşarj aralığına sahip mikro plazma hücresi modellendi. Plazma reaktör ortamında 150 Torr basınç seviyesinde argon (Ar) ve molar 5% kısmi hidrojen karışımlı argon (Ar/H2) tanımlandı. Micro plazma hücresi 1,0 kV DC sabit gerilim altında beslendi. Model, elektron yoğunluğu, elektron enerji yoğunluğu, elektron akım yoğunluğu ve elektrik potansiyeli dahil olmak üzere çeşitli deşarj parametrelerinin uzaysal-zamansal dinamiklerini çözerek AlGaSb-Ar/H2 glow deşarj mikro plazma sisteminin geçiş fiziksel özelliklerini anlamak için simüle edildi. Uygulamaya özel hibrit mikro plazma – yarı iletken tabanlı kızılötesi fotodetektör cihazlarının modellenmesinde argona bir miktar hidrojen ilavesinin etkili bir araç olarak kullanılabileceği gözlemlenmiştir.

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Cite This Article

Ongun, E., Utaş, S., Kurt, H., Hançerlioğulları, A. (2025). Modeling and Simulation of DC Glow Discharges in the AlGaSb coupled Ar/H2 Hybrid Micro Plasma System. Politeknik Dergisi, Cilt: 28 Sayı: 1, 243–250. https://doi.org/10.2339/politeknik.1406036

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