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Dergiler / Iğdır Üniversitesi Fen Bilimleri Enstitüsü Dergisi / 2026 / Cilt: 8 Sayı: 1

Magnetron Sıçratma Yöntemi ile Büyütülen Elmas Benzeri Karbon Filmlerin Adezyon ve Çoklu-Çizik Test Davranışlarının Araştırılması

Investigation of Adhesion and Multi-pass Scratch Test Behaviour of Magnetron Sputtered Diamond-Like Carbon Films

Hikmet Çiçek0000-0003-3038-4466
Sayfa
209–217
Yayın Tarihi
2018-03-31
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Elmas benzeri karbon (DLC) ince filmler sahip oldukları düşük sürtünme katsayısı, yüksek sertlik, yüksek

📌 3 Maddede Bu Makale

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Amaç & Hipotez:Elmas benzeri karbon (DLC) ince filmler sahip oldukları düşük sürtünme katsayısı, yüksek sertlik, yüksek
📊
Temel Bulgular & Veri:Elmas benzeri karbon (DLC) ince filmler sahip oldukları düşük sürtünme katsayısı, yüksek sertlik, yüksek
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Sonuç & Katkı:Elmas benzeri karbon (DLC) ince filmler sahip oldukları düşük sürtünme katsayısı, yüksek sertlik, yüksek
🔬Tür:Araştırma Makalesi
📍Kapsam:Genişletilmiş Akademik Örneklem
⚙️Değişkenler:Adezyon · DLC · magnetron sıçratma

Özet

Elmas benzeri karbon (DLC) ince filmler sahip oldukları düşük sürtünme katsayısı, yüksek sertlik, yüksek

Abstract

Diamond-like carbon (DLC) thin films are now widely spread over a wide variety of base materials due to their low coefficient of friction, high hardness, high abrasion resistance and chemical inactivity. An important aspect of such coatings is the adhesion of the coating to the substrate. In this study, The DLC films were coated on the inconel substrates with magnetron sputtering method using TiN and TiCN interlayers to increase the adhesion and to obtain higher strength. Structural, mechanical, adhesion and fatigue-like behaviors of the films were characterized. X-ray diffractometer (XRD) and scanning electron microscope (SEM) were used for structural and chemical analysis of the films. To intevtigate mechanical properties, adhesion and fatigue-like properties of the films, micro-hardness test, increasingly loaded scratch test and 100,250 and 500 cycles of multi-scratch tests were applied to the films. The microhardness of the film dtermined as 39.8 GPa. According to the adhesion tests, the first critical load value of the DLC film was determined as 22 N and the film maintained its strength on the substrate until the load of 25N. According to the results of the multi-scratch test, it was observed that the DLC films grown by the TiN-TiCN interlayer could be held on the substrate even at the end of 250 cycles.

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Bu Makaleye Atıf Yap

Çiçek, H. (2018). Magnetron Sıçratma Yöntemi ile Büyütülen Elmas Benzeri Karbon Filmlerin Adezyon ve Çoklu-Çizik Test Davranışlarının Araştırılması. Iğdır Üniversitesi Fen Bilimleri Enstitüsü Dergisi, Cilt: 8 Sayı: 1, 209–217. https://doi.org/10.21597/jist.407877

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