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Journals / Iğdır Üniversitesi Fen Bilimleri Enstitüsü Dergisi / 2019 / Cilt: 9 - Sayı: 3

Gold/palladium (Au/Pd) Bimetallic Thin Film Deposition by Radio Frequency Magnetron Sputtering Technique

Radyo Frekans Magnetron Sıçratma Tekniği ile Altın/Paladyum (Au/Pd) Bimetalik İnce Film Biriktirme

Volkan ŞENAY
Pages
1377–1384
Publication Date
2019-09-01
DOI
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AI Summary & Key Takeaways

AI Insight
⚡ TL;DR(Too Long; Didn't Read)

The effects of film thickness on the investigated properties of the thin films were reported.

📌 3 Key Takeaways

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Objective & Hypothesis:In this study, two gold/palladium (Au/Pd) thin films having 20 nm and 80 nm thickness values were simultaneously deposited on glass substrates by adjusting target-substrate distance via radio frequency (RF) magnetron sputtering technique.
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Key Findings & Data:The optical and surface properties of the produced thin films were investigated by using UV-VIS spectrophotometer, interferometer, tensiometer and atomic force microscope.
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Conclusion & Impact:The effects of film thickness on the investigated properties of the thin films were reported.
🔬Design:Research Article
📍Scope:Comprehensive Sample
⚙️Variables:Bimetalik ince filmler · optik özellikler · yüzey özellikleri

Abstract

In this study, two gold/palladium (Au/Pd) thin films having 20 nm and 80 nm thickness values were simultaneously deposited on glass substrates by adjusting target-substrate distance via radio frequency (RF) magnetron sputtering technique. The optical and surface properties of the produced thin films were investigated by using UV-VIS spectrophotometer, interferometer, tensiometer and atomic force microscope. The effects of film thickness on the investigated properties of the thin films were reported.

Özet

Bu çalışmada, 20 nm ve 80 nm kalınlığa sahip iki adet altın/paladyum (Au/Pd) ince film, eş zamanlı olarak radyo frekans (RF) magnetron sıçratma tekniği ile hedef-alttaş mesafesinin ayarlanmasıyla cam alttaşlar üzerinde biriktirilmiştir. Üretilen ince filmlerin optik ve yüzey özellikleri UV-VIS spektrofotometre, interferometre, tansiyometre ve atomik kuvvet mikroskobu kullanılarak incelenmiştir. Film kalınlığının, ince filmlerin incelenen özellikleri üzerindeki etkileri rapor edilmektedir.

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Cite This Article

ŞENAY, V. (2019). Gold/palladium (Au/Pd) Bimetallic Thin Film Deposition by Radio Frequency Magnetron Sputtering Technique. Iğdır Üniversitesi Fen Bilimleri Enstitüsü Dergisi, Cilt: 9 - Sayı: 3, 1377–1384. https://ajindex.com/articles/256780

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