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Journals / Erzincan Üniversitesi Fen Bilimleri Enstitüsü Dergisi / 2025 / Cilt: 18 Sayı: 1

Some Physical Attributes of a Cr-Doped Iron Oxide Thin Film Produced by Simultaneous RF and DC Magnetron Sputtering Technique

Eşzamanlı RF ve DC Magnetron Saçtırma Tekniği ile Üretilen Bir Cr Katkılı Demir Oksit İnce Filmin Bazı Fiziksel Özellikleri

Günay Merhan Muğlu(ATATÜRK ÜNİVERSİTESİ, HINIS MESLEK YÜKSEKOKULU)0000-0002-4664-1482
Maryam Abdolahpour Salari(ATATÜRK ÜNİVERSİTESİ, FEN FAKÜLTESİ)0009-0002-1199-5632
Volkan Şenay(BAYBURT ÜNİVERSİTESİ, BAYBURT SAĞLIK HİZMETLERİ MESLEK YÜKSEKOKULU)0000-0002-6579-2737
Sevda Sarıtaş(ATATÜRK ÜNİVERSİTESİ, İSPİR HAMZA POLAT MESLEK YÜKSEKOKULU)0000-0002-7274-3968
Pages
129–139
Publication Date
2025-03-28
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AI Summary & Key Takeaways

AI Insight
⚡ TL;DR(Too Long; Didn't Read)

This study, known for its straightforward methodology, provides valuable insights into the chromium impurity doping process of Fe2O3, contributing to a deeper understanding of its structural and morphological characteristics.

📌 3 Key Takeaways

🎯
Objective & Hypothesis:Iron oxide has recently attracted considerable interest because of its diverse structural and morphological configurations, leading to progressions in various technologies, including ultrahigh magnetic storage, magneto-optical sensors, humidity sensors, and gas sensors.
📊
Key Findings & Data:In this research, a thin film of iron oxide doped with chromium was produced on a glass substrate using simultaneous RF and DC magnetron sputtering.
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Conclusion & Impact:This study, known for its straightforward methodology, provides valuable insights into the chromium impurity doping process of Fe2O3, contributing to a deeper understanding of its structural and morphological characteristics.
🔬Design:Araştırma Makalesi
📍Scope:Comprehensive Sample
⚙️Variables:Fe2O3 · Cr katkılama · RF and DC Magnetron Saçtırma Tekniği

Abstract

Iron oxide has recently attracted considerable interest because of its diverse structural and morphological configurations, leading to progressions in various technologies, including ultrahigh magnetic storage, magneto-optical sensors, humidity sensors, and gas sensors. In this research, a thin film of iron oxide doped with chromium was produced on a glass substrate using simultaneous RF and DC magnetron sputtering. The resulting thin film's optical, structural, elemental, and surface characteristics were thoroughly investigated using UV-VIS spectroscopy, XRD, XPS, AFM, and SEM. XRD was utilized to examine the structure of the thin film, which demonstrated good crystallinity. Notably, prominent diffraction peaks at various angles corresponded to specific planes of the normal hematite phase of Fe2O3, as verified by the JCPDS Card No. 33-0664. A significant peak at (104) indicated a sturdy development of the hematite phase. The XPS spectrum analysis approved the presence of iron, oxygen, and chromium in the thin film. This study, known for its straightforward methodology, provides valuable insights into the chromium impurity doping process of Fe2O3, contributing to a deeper understanding of its structural and morphological characteristics.

Özet

Demir oksit, çeşitli yapısal ve morfolojik formları nedeniyle son zamanlarda büyük ilgi görmüş ve ultra yüksek manyetik depolama, manyeto-optik sensörler, nem sensörleri ve gaz sensörleri gibi çeşitli teknolojilerde ilerlemelere yol açmıştır. Bu araştırmada, eşzamanlı RF ve DC magnetron saçtırma kullanılarak bir cam altlık üzerinde krom katkılı ince bir demir oksit filmi üretilmiştir. Ortaya çıkan ince filmin optik, yapısal, elementel ve yüzey özellikleri UV-VIS spektroskopi, XRD, XPS, AFM ve SEM kullanılarak kapsamlı bir şekilde araştırılmıştır. Optik soğurma ölçümlerine dayanarak bant aralığı enerji değeri hesaplandı ve 2,12 eV olarak bulundu. İyi bir kristal yapı gösteren ince filmin yapısını incelemek için X-ışını kırınımı (XRD) kullanılmıştır. JCPDS Kart No. 33-0664 ile doğrulandığı üzere, çeşitli açılardaki göze çarpan kırınım pikleri, Fe2O3'ün normal hematit fazının spesifik düzlemlerine karşılık geldiği gözlemlenmiştir. (104) piki, hematit fazının kuvvetli bir şekilde oluştuğunu göstermiştir. XPS spektrum analizi ince filmde demir, oksijen ve kromun varlığını doğrulamıştır. Basit bir metodolojisi ile yürütülen bu çalışma, Fe2O3'ün krom safsızlığı katkılama sürecine ilişkin değerli bilgiler sağlayarak yapısal ve morfolojik özelliklerinin daha derinlemesine anlaşılmasına katkıda bulunmaktadır.

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Cite This Article

Muğlu, G. M., Salari, M. A., Şenay, V., Sarıtaş, S., *, V. Ş. (2025). Some Physical Attributes of a Cr-Doped Iron Oxide Thin Film Produced by Simultaneous RF and DC Magnetron Sputtering Technique. Erzincan Üniversitesi Fen Bilimleri Enstitüsü Dergisi, Cilt: 18 Sayı: 1, 129–139. https://doi.org/10.18185/erzifbed.1523374

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