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Journals / Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi / 2026 / Cilt: 16

Fabrication and comparison of n-Si/SWCNT and n-Si/MWCNT thin films

n-Si/SWCNT ve n-Si/MWCNT ince filmlerinin üretilmesi ve karşılaştırılması

Tuğba Bayazıt(RECEP TAYYİP ERDOĞAN ÜNİVERSİTESİ, REKTÖRLÜK)0000-0002-8695-0298
Pages
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Publication Date
2026-03-16
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AI Summary & Key Takeaways

AI Insight
⚡ TL;DR(Too Long; Didn't Read)

EDS results showed that increasing the coating amount increased the carbon content on the surface and reduced the signal from the substrate.

📌 3 Key Takeaways

🎯
Objective & Hypothesis:In this study, single-layer (SWCNT) and multilayer carbon nanotube (MWCNT) thin films were fabricated on an n-type silicon (n-Si) substrate, and their structural properties were comparatively investigated.
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Key Findings & Data:EDS results showed that increasing the coating amount increased the carbon content on the surface and reduced the signal from the substrate.
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Conclusion & Impact:The findings indicate that CNT-based structures offer potential for developing energy-efficient electronic components that can be used in low-power electronics and environmental sensing applications.
🔬Design:Araştırma Makalesi
📍Scope:Comprehensive Sample
⚙️Variables:SWCNT · MWCNT · İnce Film

Abstract

In this study, single-layer (SWCNT) and multilayer carbon nanotube (MWCNT) thin films were fabricated on an n-type silicon (n-Si) substrate, and their structural properties were comparatively investigated. Carbon nanotube films were coated onto the silicon surface with different droping amounts, and the surface composition and crystalline properties of the resulting structures were evaluated using Energy Dispersive X-ray Spectroscopy (EDS) and X-ray Diffraction (XRD) analyses, respectively. EDS results showed that increasing the coating amount increased the carbon content on the surface and reduced the signal from the substrate. XRD analyses revealed that the coating process did not disrupt the crystalline structure of the silicon substrate. Scanning Electron Microscope (SEM) images showed no significant differences in surface coverage and film formation between SWCNT and MWCNT coatings. The findings indicate that CNT-based structures offer potential for developing energy-efficient electronic components that can be used in low-power electronics and environmental sensing applications.

Özet

Bu çalışmada, n-tipi silikon (n-Si) altlık üzerinde tek katmanlı (SWCNT) ve çok katmanlı karbon nanotüp (MWCNT) ince filmleri üretilmiş ve yapısal özellikleri karşılaştırmalı olarak incelendi. Karbon nanotüp filmler farklı damlatma miktarlarıyla silikon yüzeye kaplandı ve elde edilen yapıların yüzey bileşimi ile kristal özellikleri sırasıyla Enerji Dağılımlı X-ışını Spektroskopisi (EDS) ve X-ışını Kırınımı (XRD) analizleriyle değerlendirildi. EDS sonuçları, kaplama miktarının artmasıyla yüzeyde karbon oranının yükseldiğini ve altlıktan gelen sinyalin azaldığını gösterdi. XRD analizleri ise kaplama işleminin silikon altlığın kristal yapısını bozmadığını ortaya koyuldu. Taramalı Elektron Mikroskobu (SEM) fotoğraflarından, SWCNT ve MWCNT kaplamalar arasında yüzey örtücülüğü ve film oluşumu bakımından belirli farklılıklar olmadığı gözlendi. Elde edilen bulgular, CNT tabanlı yapıların düşük güç tüketimli elektronik ve çevresel algılama uygulamalarında kullanılabilecek enerji verimli elektronik bileşenlerin geliştirilmesi açısından potansiyel sunduğunu göstermektedir.

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Cite This Article

Bayazıt, T. (2026). Fabrication and comparison of n-Si/SWCNT and n-Si/MWCNT thin films. Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi, Cilt: 16. https://doi.org/10.28948/ngumuh.1884938

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