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Dergiler / Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi / 2026 / Cilt: 16

n-Si/SWCNT ve n-Si/MWCNT ince filmlerinin üretilmesi ve karşılaştırılması

Fabrication and comparison of n-Si/SWCNT and n-Si/MWCNT thin films

Tuğba Bayazıt(RECEP TAYYİP ERDOĞAN ÜNİVERSİTESİ, REKTÖRLÜK)0000-0002-8695-0298
Sayfa
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Yayın Tarihi
2026-03-16
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⚡ TL;DR(1 Cümlede Hızlı Çıkarım)

Elde edilen bulgular, CNT tabanlı yapıların düşük güç tüketimli elektronik ve çevresel algılama uygulamalarında kullanılabilecek enerji verimli elektronik bileşenlerin geliştirilmesi açısından potansiyel sunduğunu göstermektedir.

📌 3 Maddede Bu Makale

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Amaç & Hipotez:Bu çalışmada, n-tipi silikon (n-Si) altlık üzerinde tek katmanlı (SWCNT) ve çok katmanlı karbon nanotüp (MWCNT) ince filmleri üretilmiş ve yapısal özellikleri karşılaştırmalı olarak incelendi.
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Temel Bulgular & Veri:Karbon nanotüp filmler farklı damlatma miktarlarıyla silikon yüzeye kaplandı ve elde edilen yapıların yüzey bileşimi ile kristal özellikleri sırasıyla Enerji Dağılımlı X-ışını Spektroskopisi (EDS) ve X-ışını Kırınımı (XRD) analizleriyle değerlendirildi.
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Sonuç & Katkı:Elde edilen bulgular, CNT tabanlı yapıların düşük güç tüketimli elektronik ve çevresel algılama uygulamalarında kullanılabilecek enerji verimli elektronik bileşenlerin geliştirilmesi açısından potansiyel sunduğunu göstermektedir.
🔬Tür:Deneysel Tarla Denemesi
📍Kapsam:Genişletilmiş Akademik Örneklem
⚙️Değişkenler:SWCNT · MWCNT · İnce Film

Özet

Bu çalışmada, n-tipi silikon (n-Si) altlık üzerinde tek katmanlı (SWCNT) ve çok katmanlı karbon nanotüp (MWCNT) ince filmleri üretilmiş ve yapısal özellikleri karşılaştırmalı olarak incelendi. Karbon nanotüp filmler farklı damlatma miktarlarıyla silikon yüzeye kaplandı ve elde edilen yapıların yüzey bileşimi ile kristal özellikleri sırasıyla Enerji Dağılımlı X-ışını Spektroskopisi (EDS) ve X-ışını Kırınımı (XRD) analizleriyle değerlendirildi. EDS sonuçları, kaplama miktarının artmasıyla yüzeyde karbon oranının yükseldiğini ve altlıktan gelen sinyalin azaldığını gösterdi. XRD analizleri ise kaplama işleminin silikon altlığın kristal yapısını bozmadığını ortaya koyuldu. Taramalı Elektron Mikroskobu (SEM) fotoğraflarından, SWCNT ve MWCNT kaplamalar arasında yüzey örtücülüğü ve film oluşumu bakımından belirli farklılıklar olmadığı gözlendi. Elde edilen bulgular, CNT tabanlı yapıların düşük güç tüketimli elektronik ve çevresel algılama uygulamalarında kullanılabilecek enerji verimli elektronik bileşenlerin geliştirilmesi açısından potansiyel sunduğunu göstermektedir.

Abstract

In this study, single-layer (SWCNT) and multilayer carbon nanotube (MWCNT) thin films were fabricated on an n-type silicon (n-Si) substrate, and their structural properties were comparatively investigated. Carbon nanotube films were coated onto the silicon surface with different droping amounts, and the surface composition and crystalline properties of the resulting structures were evaluated using Energy Dispersive X-ray Spectroscopy (EDS) and X-ray Diffraction (XRD) analyses, respectively. EDS results showed that increasing the coating amount increased the carbon content on the surface and reduced the signal from the substrate. XRD analyses revealed that the coating process did not disrupt the crystalline structure of the silicon substrate. Scanning Electron Microscope (SEM) images showed no significant differences in surface coverage and film formation between SWCNT and MWCNT coatings. The findings indicate that CNT-based structures offer potential for developing energy-efficient electronic components that can be used in low-power electronics and environmental sensing applications.

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Bu Makaleye Atıf Yap

Bayazıt, T. (2026). n-Si/SWCNT ve n-Si/MWCNT ince filmlerinin üretilmesi ve karşılaştırılması. Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi, Cilt: 16. https://doi.org/10.28948/ngumuh.1884938

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Kaynakça (37)

  1. K. Karabacak, İ. B. Çavuş ve O. Kıyılı, Polimerlerin ilektrik iletkenliği. Uludağ Üniversitesi Mühendislik Fakütesi Dergisi, 27(3), 1249–1264, 2022. https://doi.org/10.17482/uumfd.1124984.
  2. M. F. Yu, B. S. Files, S. Arepalli and R.S. Ruoff, Tensile loading of ropes of single wall carbon nanotubes and their mechanical properties. Physical Review Letters, 84(24), 5552, 2000. https://doi.org/1 0.1103/PhysRevLett.84.5552.
  3. M. S. Özsonay and Ö. Topgider, Properties and Biomedical Applications of Carbon Nanotubes, Innovative Health Sciences, 1(1), 2025. https://doi.org/10.5281.inno202514.
  4. S. Rathinavel, K. Priyadharshini, D. Panda, A review on carbon nanotube: An overview of synthesis, properties, functionalization, characterization, and the application. Materials Science and Engineering: B, 268, 2021. https://doi.org/10.1016/j.mse b.2021.115095.
  5. A. Hirsch, Functionalization of single-walled carbon nanotubes. Angewandte Chemie-International Edition, 41, 1853–1859, 2002. https://doi.o rg/10.1002/1521-3773(20020603)41:11%3C1853::A ID-ANIE1853%3E3.0.CO;2-N.
  6. S.M. Sze, K.K. Ng, Physics of Semiconductor Devices Third Edition, 2021. John wiley & Sons.
  7. P. Arora, A. Sindhu, N. Dilbaghi and A. Chaudhury, Engineered multifunctional nanowires as novel biosensing tools for highly sensitive detection. Applied Nanoscience (Switzerland), 3, 363–372, 2013. https://doi.org/10.1007/s13204-012-0142-4.
  8. X. Wang, L. Zhi and K. Müllen, Transparent, conductive graphene electrodes for dye-sensitized solar cells, Nano Lett., 8, 323–327, 2008. https://doi.org/10.1021/nl072838r.
  9. V. Parkash and A.K. Kulkarni, Optical absorption characteristics of silicon nanowires for photovoltaic applications. IEEE Trans. Nanotechnol., 10, 1293–1297, 2011. https://doi.org/10.1109/TNANO.20 11.2136383.
  10. L. A. Dronina, A. L. Danilyuk, N. G. Kovalchuk, E. V. Lutsenko, A. V. Danilchyk and S. L. Prischepa, Temperature-dependent transport of photoinduced charge carriers across a single-walled carbon nanotube film/Si interface. Materials, 18(19), 4437, 2025. https://doi.org/10.3390/ma18194437.
  11. V. Nevruzoglu, M. Kaya, M. Manir, D. B. Altuntas and Z. K. Sesen, New technological application in the preparation of Ag-containing graphene oxide structure: cryogenic coating method. Chemical Papers, 1-11, 2025. https://doi.org/10.1007/s11696-025-04401-0.
  12. P. G. Collins, K. Bradley, M. Ishigami and A. Zetthl, Extreme oxygen sensitivity of electronic properties of carbon nanotubes. Science, 287 1801–1804, 2000. https://doi.org/10.1126/science.287.5459.1801.
  13. G.U. Sumanasekera, C.K.W. Adu, S. Fang and P.C. Eklund, Effects of gas adsorption and collisions on electrical transport in single-walled carbon nanotubes. Physical Review Letters, 85(5), 1096, 2000. https://doi.org/10.1103/PhysRevLett.85.1096.
  14. X. Li, Y. Jung, K. Sakimoto, T.H. Goh, M.A. Reed and A.D. Taylor, Improved efficiency of smooth and aligned single walled carbon nanotube/silicon hybrid solar cells. Energy Environ. Sci., 6, 879–887, 2013. https://doi.org/10.1039/C2EE23716D.
  15. Y. Jia, P. Li, X. Gui, J. Wei, K. Wang, H. Zhu, D. Wu, L. Zhang, A. Cao and Y. Xu, Encapsulated carbon nanotube-oxide-silicon solar cells with stable 10% efficiency. Appl. Phys. Lett., 98, 2011. https://doi.org/10.1063/1.3573829.
  16. Q. Cao and J.A. Rogers, Ultrathin films of single-walled carbon nanotubes for electronics and sensors: A review of fundamental and applied aspects. Advanced Materials, 21, 29–53, 2009. https://doi.org/10.1002/ adma.2 00801995.
  17. P. Aurang, R. Turan and H.E. Unalan, Nanowire decorated, ultra-thin, single crystalline silicon for photovoltaic devices. Nanotechnology, 28, 2017. https://doi.org/10.1088/1361-6528/aa81b9.
  18. A.A. Tonkikh, V.I. Tsebro, E.A. Obraztsova, D. V. Rybkovskiy, A.S. Orekhov, I.I. Kondrashov, E.I. Kauppinen, A.L. Chuvilin and E.D. Obraztsova, Films of filled single-wall carbon nanotubes as a new material for high-performance air-sustainable transparent conductive electrodes operating in a wide spectral range. Nanoscale, 11, 6755–6765, 2019. https://doi.org/10.1039/C8NR10238D.
  19. R.H. Gangupomu, M.L. Sattler and D. Ramirez, Comparative study of carbon nanotubes and granular activated carbon: physicochemical properties and adsorption capacities. J. Hazard. Mater., 302, 362–374, 2016. https://doi.org/10.1016/j.jhazmat.2015.09.002.
  20. J.C. Charlier, X. Blasé and S. Roche, Electronic and transport properties of nanotubes. Rev. Mod. Phys., 79, 677–732, 2007. https://doi.org/10.1103/RevMod Phys.79.677.
  21. D.D. Tune, N. Mallik, H. Fornasier and B.S. Flavel, Breakthrough carbon nanotube–silicon heterojunction solar cells. Adv. Energy Mater., 10, 2020. https://doi.org/10.1002/aenm.201903261.
  22. H. Gu and T.M. Swager, Fabrication of free-standing, conductive, and transparent carbon nanotube films. Advanced Materials, 20, 4433–4437, 2008. https://doi.org/10.1002/adma.200801062.
  23. Z.P. Yang, L. Ci, J.A. Bur, S.Y. Lin and P.M. Ajayan, Experimental observation of an extremely dark material made by a low-density nanotube array. Nano Lett., 8, 446–451, 2008. https://doi.org/10.1 021/nl072369t.
  24. M.M. Adachi, M.P. Anantram and K.S. Karim, Optical properties of crystalline-amorphous core-shell silicon nanowires. Nano Lett., 10, 4093–4098, 2010. https://doi.org/10.1021/nl102183x.
  25. M.P. Anantram, and F. Léonard, Physics of carbon nanotube electronic devices. Reports on Progress in Physics, 69, 507–561, 2006. https://doi.org/10.10 88/0034-4885/69/3/R01.
  26. P.N. Minh and P.H. Khoi, Carbon nanotube: A novel material for applications. In: J. Phys. Conf. Ser., Institute of Physics Publishing, 2009. https://doi.org/10.1088/1742-6596/187/1/012002.
  27. G. Akgül, M. Tomakin and H. H. Erkaya, Semi-conductive carbon from industrial tea waste biomass for a pn junction. Biomass Conversion and Biorefinery, 15(4), 5327-5337, 2025. https://doi.org/10.1007/s13399-024-05413-8.
  28. O. A. Kamanina, S. S. Kamanin, A. S. Kharkova and V. A. Arlyapov, Glucose biosensor based on screen-printed electrode modified with silicone sol–gel conducting matrix containing carbon nanotubes. 3 Biotech, 9(7), 290, 2019. https://doi.org/10.100 7/s13205-019-1818-1.
  29. T. Bayazıt, Photodetector performance under blue–green–red light in ZnTe thin films grown by the quasi-closed volume method. Journal of Materials Science: Materials in Electronics, 36, 2025. https://doi.org/10.1007/s10854-025-16182-z.
  30. R. Terborg, K.J. Kim and V.D. Hodoroaba, Elemental composition and thickness determination of thin films by electron probe microanalysis. Surface and Interface Analysis, 55, 496–500, 2023. https://doi.org/10.1002/sia.7183.
  31. L. Hu, D.S. Hecht and G. Gruner, Percolation in transparent and conducting carbon nanotube networks. Nano Lett., 4, 2513–2517, 2004. https://doi.org/10.1021/nl048435y.
  32. D. Simien, J.A. Fagan, W. Luo, J.F. Douglas, K. Migler and J. Obrzut, Influence of nanotube length on the optical and conductivity properties of thin single-wall carbon nanotube networks. ACS Nano, 2,1879–1884, 2008. https://doi.org/10.1021/nn800376x
  33. K.A. Wepasnick, B.A. Smith, K.E. Schrote, H.K. Wilson, S.R. Diegelmann and D.H. Fairbrother, Surface and structural characterization of multi-walled carbon nanotubes following different oxidative treatments. Carbon N. Y., 49, 24–36, 2011. https://doi.org/10.10 16/j.car bo n.2010.08.034.
  34. A. Kuznetsova, I. Popova, J.T. Yates, M.J. Bronikowski, C.B. Huffman, J. Liu, R.E. Smalley, H.H. Hwu and J.G. Chen, Oxygen-containing functional groups on single-wall carbon nanotubes: Nexafs and vibrational spectroscopic studies. J. Am. Chem. Soc., 123, 10699–10704, 2001. https://doi.org/10.1021/ja 01 1021b.
  35. S. Gholipour, R. Rahighi, M. Panahi, A. Mirsepah, A. Bakhshayesh, F. Shahbaz Tehrani, M. Pourjafarabad, F. Ahmed, M.Z. Ansari and Y. Abdi, Photodiodes and phototransistors based on nanomaterials-silicon heterostructures: a review. Opt. Quantum Electron. 57, 2024. https://doi.org/10.1007/s11082-024-07119-7.
  36. R.H. Gangupomu, M.L. Sattler and D. Ramirez, Comparative study of carbon nanotubes and granular activated carbon: physicochemical properties and adsorption capacities. J. Hazard. Mater., 302, 362–374, 2016. https://doi.org/10.1016/j.jhazmat.2015.09.002.
  37. D. Simien, J.A. Fagan, W. Luo, J.F. Douglas, K. Migler and J. Obrzut, Influence of nanotube length on the optical and conductivity properties of thin single-wall carbon nanotube networks. ACS Nano, 2,1879–1884, 2008. https://doi.org/10.1021/nn800376x