Influence of the impurity S on heat-stability of MIS-structures on the basis of silicon

S. I. VLASOV,A. A. NASIROV,P. B. PARCHINSKIY

Dergi: Turkish Journal of Physics
Sayı: 1996 · Cilt: 20 - Sayı: 11
Sayfa: 1211–1214
DOI: —

Özet

Influence of S impurity on the heat-stability of MIS structures has been researched. Possibility of increasing heat-stability of MIS structures based on silicon has been shown.