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Journals / Turkish Journal of Physics / 1996 / Cilt: 20 - Sayı: 11

Influence of the impurity S on heat-stability of MIS-structures on the basis of silicon

S. I. VLASOV,A. A. NASIROV,P. B. PARCHINSKIY

Pages
1211–1214
DOI
—

Özet

Influence of S impurity on the heat-stability of MIS structures has been researched. Possibility of increasing heat-stability of MIS structures based on silicon has been shown.