Dergiler / Turkish Journal of Physics / 2003 / Cilt: 27 - Sayı: 3

Variation in Thickness of Copper Films Deposited at Various Distances and Angles Using the Thermionic Vacuum Arc

Sayfa
219–224
Yayın Tarihi
2003-03-01
DOI
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⚡ TL;DR(1 Cümlede Hızlı Çıkarım)

By measuring the thickness of the film on each substrate, the variation in the thickness as a function of the distance and angle with respect to the TVA source is investigated.

📌 3 Maddede Bu Makale

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Amaç & Hipotez:The thermionic vacuum arc (TVA) is a new technique for the deposition of thin metallic films.
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Temel Bulgular & Veri:Copper depositions were made on glass substrates placed at various distances and angles with respect to the TVA source.
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Sonuç & Katkı:By measuring the thickness of the film on each substrate, the variation in the thickness as a function of the distance and angle with respect to the TVA source is investigated.
🔬Tür:Araştırma Makalesi
📍Kapsam:Genişletilmiş Akademik Örneklem
⚙️Değişkenler:Deposition · anodic vacuum arc · copper vapor plasma

Özet

The thermionic vacuum arc (TVA) is a new technique for the deposition of thin metallic films. Copper depositions were made on glass substrates placed at various distances and angles with respect to the TVA source. By measuring the thickness of the film on each substrate, the variation in the thickness as a function of the distance and angle with respect to the TVA source is investigated.

Abstract

The thermionic vacuum arc (TVA) is a new technique for the deposition of thin metallic films. Copper depositions were made on glass substrates placed at various distances and angles with respect to the TVA source. By measuring the thickness of the film on each substrate, the variation in the thickness as a function of the distance and angle with respect to the TVA source is investigated.

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Bu Makaleye Atıf Yap

AKAN, T., EKEM, N. (2003). Variation in Thickness of Copper Films Deposited at Various Distances and Angles Using the Thermionic Vacuum Arc. Turkish Journal of Physics, Cilt: 27 - Sayı: 3, 219–224. https://ajindex.com/articles/724131

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