Dergiler / Turkish Journal of Physics / 2001 / Cilt: 25 - Sayı: 3

Vacuum Cryostat's Pressure Dependent Dark Conductivity Measurements on a-Si:H and a-SiN:H Films

Sayfa
265–269
DOI
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We have also studied the effect of nitrogen on these observed peaks in dark conductivity.

📌 3 Maddede Bu Makale

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Amaç & Hipotez:The electrical properties of a-Si:( H ) and a- SiN ):( H ) films prepared by plasma deposition from SiH4+NH3 gas mixtures have been investigated.
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Temel Bulgular & Veri:We observed anomalous peaks in the temperature dependent dark conductivity curves of annealed a-Si:H and a-SiN:H samples when the temperatures were increased from 90 K to room temperature at a constant heating rate.
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Sonuç & Katkı:We have also studied the effect of nitrogen on these observed peaks in dark conductivity.
🔬Tür:Araştırma Makalesi
📍Kapsam:Genişletilmiş Akademik Örneklem
⚙️Değişkenler:A. Dark conductivity · B. Cryostat pressure · C.Surface effect

Özet

The electrical properties of a-Si:( H ) and a- SiN ):( H ) films prepared by plasma deposition from SiH4+NH3 gas mixtures have been investigated. We observed anomalous peaks in the temperature dependent dark conductivity curves of annealed a-Si:H and a-SiN:H samples when the temperatures were increased from 90 K to room temperature at a constant heating rate. To study the surface adsorption effect, vacuum cryostat pressure dependence of these peaks are investigated. We have also studied the effect of nitrogen on these observed peaks in dark conductivity.

Abstract

The electrical properties of a-Si:( H ) and a- SiN ):( H ) films prepared by plasma deposition from SiH4+NH3 gas mixtures have been investigated. We observed anomalous peaks in the temperature dependent dark conductivity curves of annealed a-Si:H and a-SiN:H samples when the temperatures were increased from 90 K to room temperature at a constant heating rate. To study the surface adsorption effect, vacuum cryostat pressure dependence of these peaks are investigated. We have also studied the effect of nitrogen on these observed peaks in dark conductivity.

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Bu Makaleye Atıf Yap

AY, İ., TOLUNAY, H. (2001). Vacuum Cryostat's Pressure Dependent Dark Conductivity Measurements on a-Si:H and a-SiN:H Films. Turkish Journal of Physics, Cilt: 25 - Sayı: 3, 265–269. https://ajindex.com/articles/378650

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