AI Summary & Key Takeaways
AI InsightWe have also studied the effect of nitrogen on these observed peaks in dark conductivity.
📌 3 Key Takeaways
Abstract
The electrical properties of a-Si:( H ) and a- SiN ):( H ) films prepared by plasma deposition from SiH4+NH3 gas mixtures have been investigated. We observed anomalous peaks in the temperature dependent dark conductivity curves of annealed a-Si:H and a-SiN:H samples when the temperatures were increased from 90 K to room temperature at a constant heating rate. To study the surface adsorption effect, vacuum cryostat pressure dependence of these peaks are investigated. We have also studied the effect of nitrogen on these observed peaks in dark conductivity.
Özet
The electrical properties of a-Si:( H ) and a- SiN ):( H ) films prepared by plasma deposition from SiH4+NH3 gas mixtures have been investigated. We observed anomalous peaks in the temperature dependent dark conductivity curves of annealed a-Si:H and a-SiN:H samples when the temperatures were increased from 90 K to room temperature at a constant heating rate. To study the surface adsorption effect, vacuum cryostat pressure dependence of these peaks are investigated. We have also studied the effect of nitrogen on these observed peaks in dark conductivity.