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Dergiler / Journal of Energy Systems / 2022 / Volume: 6 Issue: 4

The features of the InGaAs/InP detectors in plasma converter systems

Selçuk Utaş(GAZI UNIVERSITY, FACULTY OF SCIENCE)0000-0002-9709-516X
Hilal Kurt(GAZI UNIVERSITY, FACULTY OF SCIENCE)0000-0002-1277-5204
Sayfa
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Yayın Tarihi
2022-12-31
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Yapay Zeka Hızlı Bakış & Çıkarımlar

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⚡ TL;DR(1 Cümlede Hızlı Çıkarım)

The non-thermal plasmas are famous especially for the microelectronic systems and surface processes such as etching and purification.

📌 3 Maddede Bu Makale

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Amaç & Hipotez:The features of the plasma cell with the InGaAs/InP detector are explored.
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Temel Bulgular & Veri:The detector is composed of InGaAs and InP wafers.
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Sonuç & Katkı:The non-thermal plasmas are famous especially for the microelectronic systems and surface processes such as etching and purification.
🔬Tür:Modelleme & Sayısal Simülasyon
📍Kapsam:Genişletilmiş Akademik Örneklem
⚙️Değişkenler:Cold plasma · Gas discharges · Infrared detectors

Abstract

The features of the plasma cell with the InGaAs/InP detector are explored. The detector is composed of InGaAs and InP wafers. Mean electron energies, migrative electron flux and current densities are evaluated by theoretical simulation analyses. The results helped to understand the uncertain plasma parameters and made the plasma structure more understandable, thereby, the complex plasma reactions can be solved via the COMSOL package. New plasma studies have focused on uniform discharges. However, the optimization of the plasma structure should be ascertained in order to explain the complex physical and chemical features in the complicated media having different discharge mechanisms. The non-thermal plasmas are famous especially for the microelectronic systems and surface processes such as etching and purification.

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Bu Makaleye Atıf Yap

Utaş, S., Kurt, H. (2022). The features of the InGaAs/InP detectors in plasma converter systems. Journal of Energy Systems, Volume: 6 Issue: 4. https://doi.org/10.30521/jes.1105215

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Kaynakça (20)

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