Journals / Turkish Journal of Physics / 2001 / Cilt: 25 - Sayı: 3

Optical transmission measurement on glow-discharge amorphous silicon nitride films

Pages
215–222
DOI
—
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AI Summary & Key Takeaways

AI Insight
⚡ TL;DR(Too Long; Didn't Read)

A systematic investigation of optical parameters has been carried out as a function of the nitrogen content of samples.

📌 3 Key Takeaways

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Objective & Hypothesis:Hydrogenated amorphous silicon nitride films have been prepared by the glow-discharge decomposition of ammonia/silane gas mixture.
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Key Findings & Data:From optical transmission measurements in the wavelength range from 400 nm to 1100 nm refractive indices absorption coefficients and optical Tauc gaps of the films have been obtained.
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Conclusion & Impact:A systematic investigation of optical parameters has been carried out as a function of the nitrogen content of samples.
🔬Design:Research Article
📍Scope:Comprehensive Sample
⚙️Variables:Domain Parameters

Özet

Hydrogenated amorphous silicon nitride films have been prepared by the glow-discharge decomposition of ammonia/silane gas mixture. From optical transmission measurements in the wavelength range from 400 nm to 1100 nm refractive indices absorption coefficients and optical Tauc gaps of the films have been obtained. A systematic investigation of optical parameters has been carried out as a function of the nitrogen content of samples.

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Cite This Article

AY, İ., TOLUNAY, H. (2001). Optical transmission measurement on glow-discharge amorphous silicon nitride films. Turkish Journal of Physics, Cilt: 25 - Sayı: 3, 215–222. https://ajindex.com/articles/378500

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References (7)

  1. Swanepoel, R., J. Phys. E: Sci.lustrum., 19, (1984) 1214
  2. Herak T.V., et al., J. Non-Crystalline Solids, 69, (1984) 39
  3. Robertson J.,Phil Mag. B, 63, (1991) 47
  4. Sotiropoulus W., et al., J. Non-Crystalline Solids, 164-166, (1983) 881
  5. Güngör T., et al, Proc. Suppl. of Balkan Phys. Lett. 5, (1997) 1451
  6. Robertson J., Phil. Mag. B, 69, (1994) 307
  7. Hasegawa S., et al., Appl. Phys. Lett, 49, (1986) 1272.