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Journals / Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi / 2026 / Cilt: 13 Sayı: 3

Investigation of the effect of oxygen flow modulation on ITO film properties to improve the performance of SHJ solar cells

SHJ güneş hücrelerinin performansını artırmak için oksijen akış modülasyonunun ITO film özellikleri üzerine etkisinin araştırılması

Emre Kartal(NIGDE UNIVERSITY, NANOTECHNOLOGY APPLICATION AND RESEARCH CENTER)0000-0002-8602-2512
Furkan Güçlüer(NİĞDE ÖMER HALİSDEMİR ÜNİVERSİTESİ, NANOTEKNOLOJİ UYGULAMA VE ARAŞTIRMA MERKEZİ)0000-0002-8708-8994
Elif Damgacı(NİĞDE ÜNİVERSİTESİ, NANOTEKNOLOJİ UYGULAMA VE ARAŞTIRMA MERKEZİ)0000-0003-2119-1435
Ali Ogün Sarp(NİĞDE ÜNİVERSİTESİ, NANOTEKNOLOJİ UYGULAMA VE ARAŞTIRMA MERKEZİ)0000-0002-7904-1678
Ayşe Seyhan(NİĞDE ÜNİVERSİTESİ, NANOTEKNOLOJİ UYGULAMA VE ARAŞTIRMA MERKEZİ)0000-0001-8090-1404
Yüksel Kaplan(NİĞDE ÜNİVERSİTESİ, NANOTEKNOLOJİ UYGULAMA VE ARAŞTIRMA MERKEZİ)0000-0002-0186-6063
Pages
1027–1033
Publication Date
2024-07-15
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AI Summary & Key Takeaways

AI Insight
⚡ TL;DR(Too Long; Didn't Read)

Based on the results, the optimal O2 ratio was determined and used in the fabrication of SHJ solar cells, achieving an efficiency of 18.6%.

📌 3 Key Takeaways

🎯
Objective & Hypothesis:Photovoltaic technology offers a sustainable solution for the growing energy needs of the world, while reducing environmental impact.
📊
Key Findings & Data:This research focuses on the impact of oxygen (O2) flow rates in the deposition of indium tin oxide (ITO) films on n-type crystalline silicon (c-Si) substrates by DC magnetron sputtering.
💡
Conclusion & Impact:Based on the results, the optimal O2 ratio was determined and used in the fabrication of SHJ solar cells, achieving an efficiency of 18.6%.
🔬Design:Araştırma Makalesi
📍Scope:Comprehensive Sample
⚙️Variables:Silisyum heteroeklem (SHJ) güneş hücresi · DC magnetron püskürtme · Şeffaf iletken oksitler (TCO

Abstract

Photovoltaic technology offers a sustainable solution for the growing energy needs of the world, while reducing environmental impact. Transparent Conductive Oxides (TCOs), which are essential in photovoltaic technology, offer high light transmittance and effective charge carrier extraction. This research focuses on the impact of oxygen (O2) flow rates in the deposition of indium tin oxide (ITO) films on n-type crystalline silicon (c-Si) substrates by DC magnetron sputtering. The structural, optical, and electrical properties were analyzed. Based on the results, the optimal O2 ratio was determined and used in the fabrication of SHJ solar cells, achieving an efficiency of 18.6%.

Özet

Fotovoltaik teknolojisi, dünyanın artan enerji ihtiyaçlarına sürdürülebilir bir çözüm sunarken çevresel etkiyi de azaltmaktadır. Fotovoltaik teknolojide önemli olan şeffaf iletken oksitler (TCO'lar), yüksek ışık geçirgenliği ve etkili yük taşıyıcı ekstraksiyonu sunar. Bu araştırma, DC magnetron püskürtme ile n-tipi kristal silisyum (c-Si) alt tabakalar üzerine indiyum kalay oksit (ITO) filmlerin biriktirilmesinde oksijen (O2) akış hızlarının etkisine odaklanmaktadır. Yapısal, optik ve elektriksel özellikler analiz edilmiştir. Elde edilen sonuçlara dayanarak, optimum O2 oranı belirlenmiş ve SHJ güneş pillerinin üretiminde kullanılarak %18,6'lık bir verimlilik elde edilmiştir.

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Cite This Article

Kartal, E., Güçlüer, F., Damgacı, E., Sarp, A. O., Seyhan, A., Kaplan, Y. (2024). Investigation of the effect of oxygen flow modulation on ITO film properties to improve the performance of SHJ solar cells. Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi, Cilt: 13 Sayı: 3, 1027–1033. https://doi.org/10.28948/ngumuh.1461409

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