Dergiler / Turkish Journal of Physics / 1995 / Cilt: 19 - Sayı: 5Electrical investigation of the MOS structure by DLTS techniqueİsmail ATILGAN,Serhat ÖZDER,Bayram KATIRCIOĞLU,Bülent MUTLUGİLDergiTurkish Journal of PhysicsSayı1995 · Cilt: 19 - Sayı: 5Sayfa697–711DOI—