Dergiler / Turkish Journal of Physics / 2004 / Cilt: 28 - Sayı: 4

A Novel Radiative Substrate Heater

Sayfa
265–269
DOI
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Özet

In this work, we have developed a new low cost radiative substrate heater for deposition of high-Tc superconducting thin films. It has all the features required for the preparation of high quality superconducting thin films. It is possible to reach ~ 800 °C substrate temperature with it by using only one 250 W halogen projector bulb.

Abstract

In this work, we have developed a new low cost radiative substrate heater for deposition of high-Tc superconducting thin films. It has all the features required for the preparation of high quality superconducting thin films. It is possible to reach ~ 800 °C substrate temperature with it by using only one 250 W halogen projector bulb.

Anahtar kelimeler: Substrate heater, Magnetron sputtering, YBa2Cu3O7-d thin film.