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Dergiler / International Journal of 3D Printing Technologies and Digital Industry / 2020 / Cilt: 4 - Sayı: 1

MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER

Nihat AKKUS
Ebuzer AYGUL
Ishak ERTUĞRUL
Senai YALCINKAYA
Sayfa
12–17
Yayın Tarihi
2022-10-19
DOI
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⚡ TL;DR(1 Cümlede Hızlı Çıkarım)

Thanks to this method, traditional MEMS production methods will be replaced by 3D printers in the following years.

📌 3 Maddede Bu Makale

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Amaç & Hipotez:This study aims to fabricate Electro-Thermal Micro Actuator with a support structure by using the Two-Photon Polymerization (2PP) technique based 3D printer.
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Temel Bulgular & Veri:This study was carried out with the 3D printer which is possible to fabricate the actuator which can be fabricated by the traditional Micro Electro Mechanical System (MEMS) methods.
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Sonuç & Katkı:Thanks to this method, traditional MEMS production methods will be replaced by 3D printers in the following years.
🔬Tür:Araştırma Makalesi
📍Kapsam:Genişletilmiş Akademik Örneklem
⚙️Değişkenler:3D Printing · MEMS · Fabrication

Özet

This study aims to fabricate Electro-Thermal Micro Actuator with a support structure by using the Two-Photon Polymerization (2PP) technique based 3D printer. This study was carried out with the 3D printer which is possible to fabricate the actuator which can be fabricated by the traditional Micro Electro Mechanical System (MEMS) methods. Due to the high cost of traditional MEMS methods, difficult and excessive processing, many studies have been carried out for new fabrication methods. 2PP is the most widely used and developed method of production. With this method, direct fabrication up to nano level is possible. Also, many chemical processes used in traditional methods will not be applied using 2PP based 3D printers. The design of the bi-directional movable Electro-Thermal Micro Actuator is carried out in this study. Supporting structures with a diameter of 2 microns allow the Actuator to be fabricated without breakage. 2PP method of the 2-micron length of the very easy and low-cost production was seen in this study. Thanks to this method, traditional MEMS production methods will be replaced by 3D printers in the following years.

Abstract

This study aims to fabricate Electro-Thermal Micro Actuator with a support structure by using the Two-Photon Polymerization (2PP) technique based 3D printer. This study was carried out with the 3D printer which is possible to fabricate the actuator which can be fabricated by the traditional Micro Electro Mechanical System (MEMS) methods. Due to the high cost of traditional MEMS methods, difficult and excessive processing, many studies have been carried out for new fabrication methods. 2PP is the most widely used and developed method of production. With this method, direct fabrication up to nano level is possible. Also, many chemical processes used in traditional methods will not be applied using 2PP based 3D printers. The design of the bi-directional movable Electro-Thermal Micro Actuator is carried out in this study. Supporting structures with a diameter of 2 microns allow the Actuator to be fabricated without breakage. 2PP method of the 2-micron length of the very easy and low-cost production was seen in this study. Thanks to this method, traditional MEMS production methods will be replaced by 3D printers in the following years.

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Bu Makaleye Atıf Yap

AKKUS, N., AYGUL, E., ERTUĞRUL, I., YALCINKAYA, S. (2022). MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER. International Journal of 3D Printing Technologies and Digital Industry, Cilt: 4 - Sayı: 1, 12–17. https://ajindex.com/articles/539824

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Kaynakça (13)

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