YBa2Cu3O7-δ Thin Film Growth on Different Substrates by Pulsed Laser Deposition

Abstract

There were a lot of research on YBa 2 Cu 3 O 7-δ (YBCO) superconducting materials and this material still draw attention. In this research, thin films of commonly used superconducting YBCO ceramic material, grown on LaAlO 3 (LAO), MgO and SrTiO 3 (STO) substrates as thin films, which have different thermal expansion constants and lattice parameters, by Pulsed Laser Deposition (PLD) technique. For all growths, 150 mTorr partial Oxygen pressure, 5 cm substrate-target distance and 800 °C substrate temperature were used. Thin films were characterized for film quality and microstructure with X-Ray Diffraction (XRD), Scanning Electron Microscopy (SEM) and Energy Dispersive Spectroscopy (EDS) techniques. Analysis of these thin films showed that mainly c oriented (00l) YBCO thin films obtained with LAO and STO substrates which are more compatible than MgO substrates for YBCO growth.