Investigation of Mechanical Properties of TiN/TiCN/TiC Multilayer Thin Films Coated on Ti6Al4V Substrate

Abstract

This study addresses the improvement of hardness and scratch resistance provided by TiN/TiCN/TiC multilayer thin films on Ti6Al4V and Silicon (Si) substrates using magnetron sputtering. X-ray diffraction (XRD), scanning electron microscopy (SEM), and nano-indentation and scratch tests have been carried out in order to characterize the film layer in terms of structural, chemical, and mechanical properties. The cubic and polycrystalline structure of TiN/TiCN/TiC film deposited on Si was confirmed by the XRD analysis. SEM cross-sectional images revealed that the coating has dense and columnar structure with a thickness of 3.065 μm and had formed a good adhesion to the substrate. Hardness and critical load values of the coated Ti6Al4V substrate, as obtained from thescratch and nano-indentation test, were 19.96 GPa and 26 N, respectively.