Journals / Turkish Journal of Physics / 2007 / Cilt: 31 - Sayı: 2
A 3-D Hall Sensor for Precise Angular Position Measurements
- Journal
- Turkish Journal of Physics
- Pages
- 97–101
- DOI
- —
Abstract
A 3-D silicon Hall effect sensor for precise angular-position measurement over 360° rotation is presented. This vector microtransducer functionally integrates into a common sensor region two parallel-field Hall devices for in-plane components of the magnetic field and one orthogonal Hall version for the perpendicular for the chip magnetic field. The advantages of this magnetometer are its low channel cross-sensitivities, remarkable simplified device design and high spatial resolution.
Özet
A 3-D silicon Hall effect sensor for precise angular-position measurement over 360° rotation is presented. This vector microtransducer functionally integrates into a common sensor region two parallel-field Hall devices for in-plane components of the magnetic field and one orthogonal Hall version for the perpendicular for the chip magnetic field. The advantages of this magnetometer are its low channel cross-sensitivities, remarkable simplified device design and high spatial resolution.