Journals / Turkish Journal of Physics / 2004 / Cilt: 28 - Sayı: 4

Effect of Development Time on Polymer Phase Separation in a PMMA Resist

Pages
271–276
DOI
—
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AI Summary & Key Takeaways

AI Insight
⚡ TL;DR(Too Long; Didn't Read)

The polymer phase separation is found to increase with the development time.

📌 3 Key Takeaways

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Objective & Hypothesis:Developer composition type and development technique are known to influence surface and edge roughness in polymethylemethacrylate (PMMA); and it is during development, we believe, that the result is most influenced by the phase separation into polymer-rich and polymer-poor regions.
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Key Findings & Data:In this paper, we investigate the effect of development time on the extent of polymer phase separation in an exposed PMMA developed in a standard developer i.e. 1:3 MIBK:IPA at 20 °C and rinsed in pure IPA for 30 sec.
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Conclusion & Impact:The polymer phase separation is found to increase with the development time.
🔬Design:Research Article
📍Scope:Comprehensive Sample
⚙️Variables:e-beam · surface roughness · PMMA

Abstract

Developer composition type and development technique are known to influence surface and edge roughness in polymethylemethacrylate (PMMA); and it is during development, we believe, that the result is most influenced by the phase separation into polymer-rich and polymer-poor regions. This polymer phase separation is more prominent in a weaker developer and low temperature. In this paper, we investigate the effect of development time on the extent of polymer phase separation in an exposed PMMA developed in a standard developer i.e. 1:3 MIBK:IPA at 20 °C and rinsed in pure IPA for 30 sec. The polymer phase separation is found to increase with the development time.

Özet

Developer composition type and development technique are known to influence surface and edge roughness in polymethylemethacrylate (PMMA); and it is during development, we believe, that the result is most influenced by the phase separation into polymer-rich and polymer-poor regions. This polymer phase separation is more prominent in a weaker developer and low temperature. In this paper, we investigate the effect of development time on the extent of polymer phase separation in an exposed PMMA developed in a standard developer i.e. 1:3 MIBK:IPA at 20 °C and rinsed in pure IPA for 30 sec. The polymer phase separation is found to increase with the development time.

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Cite This Article

KHALID, M. N., YASIN, S., KHAN, M. R. (2004). Effect of Development Time on Polymer Phase Separation in a PMMA Resist. Turkish Journal of Physics, Cilt: 28 - Sayı: 4, 271–276. https://ajindex.com/articles/378620

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