Journals / Gazi University Journal of Science Part A: Engineering and Innovation / 2026 / Volume: 13 Issue: 3

Optical Characterization of Boron Doped In2O3 Thin Films

Mehmet Temiz(SELÇUK ÜNİVERSİTESİ, KARAPINAR AYDOĞANLAR MESLEK YÜKSEKOKULU, ELEKTRİK VE ENERJİ BÖLÜMÜ, ALTERNATİF ENERJİ KAYNAKLARI TEKNOLOJİSİ PR.)0000-0003-2974-8824
Pages
—
Publication Date
2026-09-30
🏛️Bibliographic metadata and full text access for this article are provided via DergiPark.
DergiPark Record ↗
✨

AI Summary & Key Takeaways

AI Insight
⚡ TL;DR(Too Long; Didn't Read)

The results show that the addition of boron will be an effective method for controlling optical properties and that boron-doped indium oxide films will be an important material for transparent conductive oxide applications and thin-film transistor technologies.

📌 3 Key Takeaways

🎯
Objective & Hypothesis:Indium oxide (In 2 O 3 ) thin films are valuable materials for optoelectronic applications owing to their wide band gap, high transparency, and modifiable electrical properties.
📊
Key Findings & Data:This study focuses on the comprehensive optical characterization of undoped and boron-doped In 2 O 3 thin films with various boron concentrations (0.02, 0.03, 0.06, and 0.09 M) prepared by spray pyrolysis.
💡
Conclusion & Impact:The results show that the addition of boron will be an effective method for controlling optical properties and that boron-doped indium oxide films will be an important material for transparent conductive oxide applications and thin-film transistor technologies.
🔬Design:Research Article
📍Scope:2000 Verileri
⚙️Variables:Indium Oxide (In2O3) · Boron Doping · Spray Pyrolysis

Abstract

Indium oxide (In 2 O 3 ) thin films are valuable materials for optoelectronic applications owing to their wide band gap, high transparency, and modifiable electrical properties. This study focuses on the comprehensive optical characterization of undoped and boron-doped In 2 O 3 thin films with various boron concentrations (0.02, 0.03, 0.06, and 0.09 M) prepared by spray pyrolysis. Systematic analysis of transmittance and reflection spectra measured using a JASCO spectrophotometer (300–2000 nm range, 2 nm pitch) resulted in the determination of various fundamental optical parameters such as absorbance, absorption coefficient, optical band gap, refractive index, extinction coefficient, dielectric constants, and optical conductivity. The undoped In₂O₃ film was found to have a direct band gap of 3.37 eV with the sharp absorption edge located in the UV region (300–400 nm) and an average refractive index of 2.31. Also, the film exhibited moderate optical transmittance in the visible range (400–700 nm) with transmittance values generally below % 70. It was observed that the calculated optical properties changed systematically with the addition of boron. For example, band gaps ranged from 2.88 eV (0.06 M) to 3.46 eV (0.09 M), while refractive indices ranged from 2.34 (0.09 M) to 2.58 (0.03 M). The results show that the addition of boron will be an effective method for controlling optical properties and that boron-doped indium oxide films will be an important material for transparent conductive oxide applications and thin-film transistor technologies. This study focuses on a comprehensive analysis of the optical parameters of In 2 O 3 :B films. The scope of the study is limited to optical characterization, and the results are supported by correlation with the author's previous structural and electrical studies. This approach reveals the relationship between optical changes and crystal structure and carrier mechanisms.

🔖

Cite This Article

Temiz, M. (2026). Optical Characterization of Boron Doped In2O3 Thin Films. Gazi University Journal of Science Part A: Engineering and Innovation, Volume: 13 Issue: 3. https://doi.org/10.54287/gujsa.1968187

📄 Full Text PDF Viewer

📄

PDF görüntüleyici hazırlanıyor...

References (30)

  1. Aikawa, S., Shibata, Y., & Morinaga, Y. (2020). B-doped In2O3Transparent Electrode for Si-based Schottky Barrier Solar Cell Application. In: 2020 IEEE 20th International Conference on Nanotechnology (IEEE-NANO) (pp. 202-206), 29-31 July 2020, Montreal, QC, Canada. https://doi.org/10.1109/NANO47656.2020.9183539
  2. Aksoy, S., Caglar, Y., Ilican, S., & Caglar, M. (2012). Sol–gel derived Li–Mg co-doped ZnO films: Preparation and characterization via XRD, XPS, FESEM. Journal of Alloys and Compounds, 512(1), 171–178. https://doi.org/10.1016/J.JALLCOM.2011.09.058
  3. Arulkumar, S., Parthiban, S., Gnanaprakash, D., & Kwon, J. Y. (2019). Solution processed boron doped indium oxide thin-film as channel layer in thin-film transistors. Journal of Materials Science: Materials in Electronics, 30(20), 18696–18701. https://doi.org/10.1007/S10854-019-02222-Y
  4. Barış, B., Özdemir, H. G., Tuğluoğlu, N., Karadeniz, S., Yüksel, Ö. F., & Kişnişci, Z. (2014). Optical dispersion and dielectric properties of rubrene organic semiconductor thin film. Journal of Materials Science: Materials in Electronics, 25(8), 3586–3593. https://doi.org/10.1007/S10854-014-2060-6
  5. Burstein, E. (1954). Anomalous Optical Absorption Limit in InSb. Physical Review, 93(3), 632–633. https://doi.org/10.1103/PhysRev.93.632
  6. Chen, T., Ma, T., & Barker, R. C. (1983). Infrared transparent and electrically conductive thin film of In2O3. Applied Physics Letters, 43(10), 901–903. https://doi.org/10.1063/1.94199
  7. Fortunato, E., Ginley, D., Hosono, H., & Paine, D. C. (2007). Transparent conducting oxides for photovoltaics. MRS Bulletin, 32(3), 242–247. https://doi.org/10.1557/mrs2007.29
  8. Granqvist, C. G. (2007). Transparent conductors as solar energy materials: A panoramic review. Solar Energy Materials and Solar Cells, 91(17), 1529–1598. https://doi.org/10.1016/j.solmat.2007.04.031
  9. Hosono, H. (2007). Recent progress in transparent oxide semiconductors: Materials and device application. Thin Solid Films, 515(15), 6000–6014. https://doi.org/10.1016/j.tsf.2006.12.125
  10. Ikhmayies, S. J. (2017). Transparent conducting oxides for solar cell applications. In: A. Sayigh (Eds.), Mediterranean Green Buildings and Renewable Energy: Selected Papers from the World Renewable Energy Network’s Med Green Forum, (pp. 899–907). https://doi.org/10.1007/978-3-319-30746-6_70
  11. Kavgacı, M., Küçükönder, A., & Kerli, S. (2021). Investigation of structural, optical and radiation shielding properties of boron-doped In2O3 thin films. Journal of Materials Science: Materials in Electronics, 32(11), 15484–15490. https://doi.org/10.1007/S10854-021-06097-W
  12. Kim, H., Piqué, A., Horwitz, J. S., Murata, H., Kafafi, Z. H., Gilmore, C. M., & Chrisey, D. B. (2000). Effect of aluminum doping on zinc oxide thin films grown by pulsed laser deposition for organic light-emitting devices. Thin Solid Films, 377–378, 798–802. https://doi.org/10.1016/S0040-6090(00)01290-6
  13. King, P. D. C., Veal, T. D., Fuchs, F., Wang, Ch. Y., Payne, D. J., Bourlange, A., Zhang, H., Bell, G. R., Cimalla, V., Ambacher, O., Egdell, R. G., Bechstedt, F., & McConville, C. F. (2009). Band gap, electronic structure, and surface electron accumulation of cubic and rhombohedral In2O3. Physical Review B - Condensed Matter and Materials Physics, 79(20), 205211. https://doi.org/10.1103/PhysRevB.79.205211
  14. Mergel, D., & Qiao, Z. (2004). Correlation of lattice distortion with optical and electrical properties of In2O3:Sn films. Journal of Applied Physics, 95(10), 5608–5615. https://doi.org/10.1063/1.1704852
  15. Moss, T. S. (1954). The Interpretation of the Properties of Indium Antimonide. Proceedings of the Physical Society. Section B, 67(10), 775. https://doi.org/10.1088/0370-1301/67/10/306
  16. Pankove, J. I. (1975). Optical Processes in Semiconductors. Dover Publications, Inc.
  17. Parthiban, S., & Kwon, J.-Y. (2015). Amorphous boron–indium–zinc-oxide active channel layers for thin-film transistor fabrication. Journal of Materials Chemistry C, 3(8), 1661–1665. https://doi.org/10.1039/C4TC01831A
  18. Schmidt-Grund, R., Kranert, C., Böntgen, T., von Wenckstern, H., Krauß, H., & Grundmann, M. (2014). Dielectric function in the NIR-VUV spectral range of (InxGa 1-x)2O3 thin films. Journal of Applied Physics, 116(5), 053510. https://doi.org/10.1063/1.4891521
  19. Singh, J., Bhardwaj, P., Kumar, R., & Verma, V. (2024). Progress in Developing Highly Efficient p-type TCOs for Transparent Electronics: A Comprehensive Review. Journal of Electronic Materials, 53(12), 7179–7210. https://doi.org/10.1007/s11664-024-11445-7
  20. Stewart, K. A., Gouliouk, V., Keszler, D. A., & Wager, J. F. (2017). Sputtered boron indium oxide thin-film transistors. Solid-State Electronics, 137, 80–84. https://doi.org/10.1016/j.sse.2017.08.004
  21. Temiz, M., Yildirim, R. G., Bedir, M. B., & Öztaş, M. (2020). Effect of boric acid concentrations on the characterization of the In2O3 thin films growth by spraying pyrolysis method. Digest Journal of Nanomaterials and Biostructures, 15(3), 689–698. https://doi.org/10.15251/DJNB.2020.153.689
  22. Tikhii, A. A., Nikolaenko, Y. M., Svyrydova, K. A., & Zhikharev, I. V. (2023). Optical Properties and Structure of In2O3 Films Deposited on Al2O3 (012) Substrates by dc-Magnetron Sputtering. Journal of Surface Investigation. X-Ray, Synchrotron and Neutron Techniques, (5), 39–45. https://doi.org/10.31857/S1028096023050163
  23. Toprak, B. Ç., Efkere, H. İ., Aydın, S. Ş., Tataroğlu, A., & Özçelik, S. (2024). Structural, morphological, optical and electrical characterization of MgO thin films grown by sputtering technique on different substrates. Journal of Materials Science: Materials in Electronics, 35(20), 1389. https://doi.org/10.1007/s10854-024-13116-z
  24. Weiher, R. L., & Ley, R. P. (1966). Optical Properties of Indium Oxide. Journal of Applied Physics, 37(1), 299–302. https://doi.org/10.1063/1.1707830
  25. Wooten, F. (1972). Optical properties of solids. Academic Press.
  26. Xu, W., Peng, T., Li, Y., Xu, F., Zhang, Y., Zhao, C., Fang, M., Han, S., Zhu, D., Cao, P., Liu, W., & Lu, Y. (2022). Water-Processed Ultrathin Crystalline Indium–Boron–Oxide Channel for High-Performance Thin-Film Transistor Applications. Nanomaterials, 12(7), 1125. https://doi.org/10.3390/nano12071125
  27. Yüksel, Ö. F., Özel, F., Akın, Ü., & Tuğluoğlu, N. (2022). Structural, optical and dispersion studies on Cu2NiSn(SSe)4 nanocrystals thin films. Physica B: Condensed Matter, 625, 413530. https://doi.org/10.1016/J.PHYSB.2021.413530
  28. Zhang, X., Wang, B., Huang, W., Chen, Y., Wang, G., Zeng, L., Zhu, W., Bedzyk, M. J., Zhang, W., Medvedeva, J. E., Facchetti, A., & Marks, T. J. (2018). Synergistic Boron Doping of Semiconductor and Dielectric Layers for High-Performance Metal Oxide Transistors: Interplay of Experiment and Theory. Journal of the American Chemical Society, 140(39), 12501–12510. https://doi.org/10.1021/JACS.8B06395
  29. Zhi, J., Zhou, M., Zhang, Z., Reiser, O., & Huang, F. (2021). Interstitial boron-doped mesoporous semiconductor oxides for ultratransparent energy storage. Nature Communications, 12(1), 445. https://doi.org/10.1038/s41467-020-20352-4
  30. Zhu, X., Li, Y., Zhang, H., Song, L., Zu, H., Qin, Y., Liu, L., Li, Y., & Wang, F. (2020). High-performance field effect transistors based on large ratio metal (Al、Ga、Cr) doped In2O3 nanofibers. Journal of Alloys and Compounds, 830, 154578. https://doi.org/10.1016/J.JALLCOM.2020.154578